Optical alignment detection system

Optics: measuring and testing – By alignment in lateral direction

Reexamination Certificate

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C356S400000

Reexamination Certificate

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11263333

ABSTRACT:
An optical alignment detection system for detecting the alignment of a first object relative to a second object is provided. One or more light sources and one or more light detectors, either or both of which are secured relative to the second object, are used to detect the position of one or more light scattering elements on the first object.

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