Optical aligner equipped with luminance sensor on movable stage

Details Optical aligner equipped with luminance sensor on movable stage Optical aligner equipped with luminance sensor on movable stage

1994-12-20

1996-07-02

Epps, Georgia Y.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

356400, G01N 2186, G01V 904

Patent

active

055324975

ABSTRACT:
A projection aligner transfers a pattern image of a reticle by using a light radiated from a light source through a diaphragm to a photo-resist layer, and the position of the light source is automatically regulated on the basis of pieces of illuminance data simultaneously measured on an image forming plane so that the regulation is exact and completed within a short time period.

REFERENCES:
patent: 4929824 (1990-05-01), Miyazaki
patent: 4937611 (1990-06-01), Miyazaki
patent: 5146258 (1992-09-01), Bell et al.
patent: 5184172 (1993-02-01), Miyazaki
patent: 5251067 (1993-10-01), Kamon
patent: 5264898 (1993-11-01), Kamon et al.
patent: 5335044 (1994-08-01), Shiraishi
patent: 5379090 (1995-01-01), Shiraishi
patent: 5420417 (1995-05-01), Shiraishi
patent: 5436692 (1995-07-01), Noguchi

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