Operating a solid state particle detector within a magnetic defl

Details Operating a solid state particle detector within a magnetic defl Operating a solid state particle detector within a magnetic defl

1996-10-04

1999-05-04

Saadat, Mahshid

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

Electromagnetic or particle radiation

25037001, 25037008, 25037009, 257428, 257680, 378189, H01L 31115, H01L 2714, H01L 3100, G01J 120

Patent

active

059006676

ABSTRACT:
A solid state electron or x-ray detector is mounted within the time-varying magnetic deflection fields of a charged particle beam system. A minimum volume of high resistivity conductors and insulating materials are used in the mounting to minimize eddy currents that otherwise cause dynamic deflection distortions. Segmented conductive elastomer members make electrical and mechanical contact with the active surface of the detector. A flexible PC board connects the detector active areas to external signal processing electronics.

REFERENCES:
patent: 4897545 (1990-01-01), Danilatos
patent: 5032724 (1991-07-01), Gerlach et al.
patent: 5051600 (1991-09-01), Schuetz et al.
patent: 5317617 (1994-05-01), Lange
patent: 5387795 (1995-02-01), Kuzay et al.
patent: 5391874 (1995-02-01), Ellis
patent: 5481109 (1996-01-01), Ninomiya et al.
patent: 5497098 (1996-03-01), Heil et al.

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