Open-loop for waveform acquisition

Details Open-loop for waveform acquisition Open-loop for waveform acquisition

2005-02-08

2005-02-08

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Testing system

Of circuit

C324S1540PB

Reexamination Certificate

active

06853941

ABSTRACT:
Methods and apparatus, including computer program products, implementing and using techniques for open-loop waveform acquisition. In general, in one aspect, the invention provides a method for open-loop waveform acquisition. The method includes acquiring an S-curve of an acquisition loop of an electron-beam probe system. The S-curve represents a response of the acquisition loop to changes of potential differences between the acquisition loop and a device under test. The method includes calibrating the acquisition loop to obtain a linear region in the acquired S-curve and using the linear portion of the acquired S-curve to calculate voltage at a probe point of the device under test.

REFERENCES:
patent: 5093616 (1992-03-01), Seitoh et al.
patent: 5416426 (1995-05-01), Okubo et al.
patent: 5638005 (1997-06-01), Rajan et al.
patent: 0 747 716 (1996-12-01), None
H. Fujioka, “An Open Loop Spectroscopy for Quantitive Waveform Measurements With The Scanning Electron Microscope”,Journal of Physics (Scientific Instruments), vol. 18, No. 4, Apr. 1985 pp. 284-285 UK.
Long, J.T. L., “Electron Beam Testing Technology, Microdevices Physics and Fabrication Technologies”, Plenum, 1993, New York (pp. 44-45).

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