Open hole-based diffractive light modulator

Details Open hole-based diffractive light modulator Open hole-based diffractive light modulator

2007-02-06

2007-02-06

Harrington, Alicia M. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S292000

Reexamination Certificate

active

10952573

ABSTRACT:
The present invention relates, in general, to a diffractive light modulator and, more particularly, to an open hole-based diffractive light modulator, which includes a lower micromirror positioned on a silicon substrate and an upper micromirror provided with a plurality of open holes spaced apart from the silicon substrate, thus allowing the upper micromirror and the lower micromirror deposited on the silicon substrate to form pixels.

REFERENCES:
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5949570 (1999-09-01), Shiono et al.
patent: 6141139 (2000-10-01), Furlani et al.
patent: 2005/0068609 (2005-03-01), Trisnadi et al.
patent: 2005/0237743 (2005-10-01), Payne et al.

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