Opaque chrome coating suitable for etching

Details Opaque chrome coating suitable for etching Opaque chrome coating suitable for etching

2004-10-21

2008-12-02

Olsen, Allan (Department: 1792)

Etching a substrate: processes

Forming or treating mask used for its nonetching function

C428S137000

Reexamination Certificate

active

07459095

ABSTRACT:
A substrate includes an opaque chrome coating on a surface of the substrate dry-etched to form an aperture, wherein chrome in the aperture is below detectable limit. A method of forming an opaque chrome coating having at least two layers on a substrate includes depositing an initial chrome layer having a thickness of less than 10 nm on the substrate without ion-assist or with undetectable ion-assist, and then depositing the remainder of the at least two layers, with or without ion-assist, to form an opaque chrome coating.

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