Stock material or miscellaneous articles – All metal or with adjacent metals – Composite; i.e. – plural – adjacent – spatially distinct metal...
Reexamination Certificate
2007-01-09
2007-01-09
Lam, Cathy F. (Department: 1775)
Stock material or miscellaneous articles
All metal or with adjacent metals
Composite; i.e., plural, adjacent, spatially distinct metal...
C428S635000, C430S002000, C430S313000, C430S316000, C430S317000, C430S318000, C430S322000
Reexamination Certificate
active
10971618
ABSTRACT:
A substrate with a patterned opaque coating formable into an opaque aperture in one process is provided. The opaque coating includes at least a bottom layer and a top layer. The bottom and top layers each include a material selected from the group consisting of chrome and chrome oxide. The top layer has a compressive stress, which makes the opaque coating more resistant to pinhole formation during downstream processing.
REFERENCES:
patent: 5230971 (1993-07-01), Aplay
patent: 5292623 (1994-03-01), Kemp et al.
patent: 5780187 (1998-07-01), Pierrat
patent: 5976639 (1999-11-01), Iwata
patent: 6472107 (2002-10-01), Chan
patent: 6887627 (2005-05-01), Chung et al.
patent: 6908716 (2005-06-01), Chan
J. D. Rancort, “Optical Thin Films User Handbook”, SPIE Opt. Eng. Press, Bellingham, WA (1996) pp. 126-129.
P. Baumeister, “Starting designs for the computer optimization of optical coatings”, Appl. Opt. 34(22) 4835 (1995).
Nakajima, K.; Onisawa, K.-I.; Chahara, K.-I.; Minemura, T.; Kamei, M.; Setoyama, E, “Stress reduction of chromium thin films deposited by cluster-type sputtering systems for ultra-large-size (550x650mm) substrates,” Vacuum, 51(4) 761 (1998).
Zhao, Z.B.; Yalisove, S.M.; Rek, Z.U.; Bilello, J.C., “Evolution of anistrpic microstructure and residual stress in sputtered Cr films,” Journal of Applied Physics, 92 (12) 7183 (2002).
Hoffman, D.W., “Internal stresses in Cr, Mo, Ta and Pt films deposited by sputtering from a planar magnetron source,” J. Vac. Sci. Techn. 20(3) 355 (1982).
H. Chen, T. Wang, F. Ko, and C. Hsieh, “Multilayer Bottom Antireflective Coatings for High Numerical Aperture and Modified Illumination Exposure Systems”, Jap. J. App. Phys. 1 42(6B) 3737 (2003).
Bellman Robert
Ukrainczyk Ljerka
Corning Incorporated
Douglas Walter M.
Lam Cathy F.
Schaeberle Timothy M.
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