Data processing: measuring – calibrating – or testing – Measurement system – Remote supervisory monitoring
Reexamination Certificate
2005-06-21
2005-06-21
Hoff, Marc S. (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Remote supervisory monitoring
C702S179000, C702S183000, C702S186000
Reexamination Certificate
active
06909996
ABSTRACT:
An online monitoring system is provided having a computer having a GUI having a build of material display; a material warehouse in communication with a manufacturing execution system (“MES”) for controlling execution of a plurality of recipes used to make an associated product; a capacity consumption system (“CCS”) for determining future processing capacity within a wafer fabrication facility in accordance with a total material consumption algorithm. A method of use having the steps of:providing a representative material for consumption within a fabrication facility;calculating a total amount of the representative material consumed within a wafer fabrication facility in accordance with a material consumption algorithm, wherein the material consumption algorithm is calculated using a plurality of variables; andbenchmarking material usage by each piece of fabrication equipment disposed within one or a plurality of fabrication facilities to help plan for future material usage and to improve fabrication production.
REFERENCES:
patent: 6526547 (2003-02-01), Breiner et al.
patent: 2003/0009430 (2003-01-01), Burkey et al.
patent: 2003/0225474 (2003-12-01), Mata et al.
patent: 495819 (2001-05-01), None
Huang Allison
Lin Chih-Tsong
Hoff Marc S.
Suarez Felix
Taiwan Semiconductor Manufacturing Co. Ltd
Tung & Associates
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