One-piece silicon substrate having fiber optic stops and a refle

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer

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356345, G01B 902

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active

053812310

ABSTRACT:
Fiber optic interferometric sensors and methods of manufacturing same are disclosed. These sensors comprise a unitary substrate having a channel therein and an axis extending through the channel. The unitary substrate also comprises a reflective surface extending in a plane perpendicular to the axis. An optical fiber having a terminated surface thereon is also provided. The optical fiber extends axially within the channel and is arranged so that the terminated surface and the reflective surface are movable relative to one another in response to a phenomenon to be sensed. The unitary substrate also comprises positioning means integral therewith for positioning the optical fiber within the channel. The method of manufacturing the fiber optic interferometric sensors comprise the steps of providing a unitary substrate and forming a channel therein so that an axis extends therethrough. A reflective surface integrally formed with the substrate perpendicular to the axis of the channel and an optical fiber is then inserted therein.

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