On-the-fly optical interference measurement device, machining de

Details On-the-fly optical interference measurement device, machining de On-the-fly optical interference measurement device, machining de

1998-06-23

1999-12-07

Kim, Robert H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356357, 356345, G01B 902

Patent

active

059992646

ABSTRACT:
In a machining device, a workpiece is laid on a working mechanism base and a lapping machine laid on the workpiece is operated to rotate. A lap liquid is supplied between the lapping machine and the workpiece. The lapping machine is provided with a plurality of holes as measurement windows. Above the workpiece, an interferometer is disposed on the opposite side of the lapping machine from the workpiece. The interferometer detects interference fringes on a machined surface of the workpiece through the measurement windows. Based on detection results, the rotation of the lapping machine and the position of the workpiece are controlled.

REFERENCES:
patent: 5433651 (1995-07-01), Lustig et al.
patent: 5649849 (1997-07-01), Pileri et al.
patent: 5724144 (1998-03-01), Muller et al.
"Recent Advances in Optical Interference Measurement Methods", Yatagai, Precision Machinery Apr. 1985, pp. 65-72.
"Absolute Measurement of Surface Contours Using Interferometers", Nagahama, Lecture text for 16.sup.th Symposium on Optics, 1991, Lecture no. 3, pp. 55-58.

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