Optical: systems and elements – Deflection using a moving element – By moving a reflective element
Reexamination Certificate
2007-07-17
2007-07-17
Phan, James (Department: 2872)
Optical: systems and elements
Deflection using a moving element
By moving a reflective element
C359S199200, C359S900000, C219S121780, C219S121800
Reexamination Certificate
active
10985840
ABSTRACT:
A laser-based workpiece processing system includes sensors connected to a sensor controller that converts sensor signals into focused spot motion commands for actuating a beam steering device, such as a two-axis steering mirror. The sensors may include a beam position sensor for correcting errors detected in the optical path, such as thermally-induced beam wandering in response to laser or acousto-optic modulator pointing stability, or optical mount dynamics.
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Bruland Kelly
Grant Keith
Swaringen Stephen
Vandergiessen Clint
Electro Scientific Industries Inc.
Phan James
Stoel Rives LLP
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