Electrolysis: processes – compositions used therein – and methods – Electrolytic synthesis – Preparing inorganic compound
Reexamination Certificate
2008-05-13
2008-05-13
Langel, Wayne A. (Department: 1793)
Electrolysis: processes, compositions used therein, and methods
Electrolytic synthesis
Preparing inorganic compound
C422S148000, C423S352000, C423S358000, C423S359000
Reexamination Certificate
active
11130505
ABSTRACT:
A system and method for generating, purifying, and using ultra-pure ammonia on-site, such as at a semiconductor manufacturing facility. The system includes an ammonia generation system configured to generate ammonia including carbon dioxide, water, and other impurities. A purification system is provided with the generation system in the manufacturing facility and is linked to the output of the generation system. The purification system processes the effluent from the ammonia generation system to remove substantially all of the carbon dioxide, water, and other impurities to produce an outlet stream of ultra-pure ammonia. The system further includes a point of use system provided at the same manufacturing facility to utilize the outlet stream of ultra-pure ammonia.
REFERENCES:
patent: 4287162 (1981-09-01), Scheibel
patent: 5116591 (1992-05-01), Witter
patent: 5427759 (1995-06-01), Heitmann
patent: 5496778 (1996-03-01), Hoffman et al.
patent: 5846385 (1998-12-01), Chien
patent: 6001223 (1999-12-01), Hoffman et al.
patent: 6077491 (2000-06-01), Cooper et al.
patent: 6183720 (2001-02-01), Laederich et al.
patent: 6322762 (2001-11-01), Cooper et al.
patent: 6436359 (2002-08-01), Spencer, III et al.
patent: 6461411 (2002-10-01), Watanabe et al.
patent: 2001/0010286 (2001-08-01), Wostbrock et al.
patent: 2002/0102197 (2002-08-01), Cooper et al.
patent: 2002/0146363 (2002-10-01), Benderly et al.
patent: 2003/0097932 (2003-05-01), Watanabe et al.
patent: 2003/0108473 (2003-06-01), Dershowitz et al.
Del Prato Thomas A.
Spicer Harold G.
Langel Wayne A.
Matheson Tri-Gas, Inc.
Townsend and Townsend / and Crew LLP
LandOfFree
On-site generation, purification, and distribution of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with On-site generation, purification, and distribution of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and On-site generation, purification, and distribution of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3947110