On-site ammonia purification for semiconductor manufacture

Details On-site ammonia purification for semiconductor manufacture On-site ammonia purification for semiconductor manufacture

1998-03-10

1999-12-14

Bhat, Nina

Distillation: processes, separatory

Distilling to separate or remove only water

203 40, 203 42, 423237, 423238, 423352, 95226, 95232, B01D 300

Patent

active

060012234

ABSTRACT:
Highly purified ammonia for use in semiconductor manufacturing is prepared on-site by drawing ammonia vapor from a liquid ammonia reservoir, passing the vapor through a filter capable of filtering out particles of less than 0.005 micron in size, and scrubbing the filtered vapor in a high-pH aqueous scrubber.

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