On-line ozonation in ultra pure water membrane filtration

Details On-line ozonation in ultra pure water membrane filtration On-line ozonation in ultra pure water membrane filtration

1996-05-16

1997-07-08

Fortuna, Ana

Liquid purification or separation

Processes

Liquid/liquid solvent or colloidal extraction or diffusing...

210636, 210650, 210653, 210900, 210760, B01D 6100

Patent

active

056457278

ABSTRACT:
Particle filtration of a feed of highly corrosive ultra pure water and contaminants is disclosed through a metal oxide membrane on ceramic support in combination with on-line ozonation. In one aspect, the filtering of ultra pure water includes passing the feed cross-flow through a multichannel sintered monolithic metal oxide membrane on ceramic support to form a permeate of particle-free ultra pure water. Although high recoveries per pass rates were used, no detectable metal ions including aluminum, zirconium, or yttrium ions were found in the ultra pure water permeate. The apparatus and process of the present invention for filtering ultra pure water include cross-flow filtration using multichannel monolithic ceramic membranes at suitable pore sizes in a total chemical process system including elevated temperatures and on-line ozonation sterilization of the ceramic membrane particle filter in high purity water applications for electronics manufacturing.

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