On-die micro-transformer structures with magnetic materials

Details On-die micro-transformer structures with magnetic materials On-die micro-transformer structures with magnetic materials

2003-05-05

2010-12-14

Nguyen, Tuyen (Department: 2832)

Inductor devices

Coil or coil turn supports or spacers

Printed circuit-type coil

Reexamination Certificate

active

07852185

ABSTRACT:
A transformer integrated on a die, the transformer comprising a set of conductive lines formed on the die within one layer and interconnected among each other so that no two lines belonging to any one winding are nearest neighbors. The set of conductive lines is surrounded by a magnetic material, which may be amorphous CoZrTa, CoFeHfO, CoAlO, FeSiO, CoFeAlO, CoNbTa, CoZr, and other amorphous cobalt alloys. The transformer may be operated at frequencies higher than 10 MHz and as high as 1 GHz, with relatively low resistance and relatively high magnetic coupling between the windings.

REFERENCES:
patent: 3607462 (1971-09-01), Laing
patent: 3881244 (1975-05-01), Kendall
patent: 3905883 (1975-09-01), Hanazono et al.
patent: 4543553 (1985-09-01), Mandai et al.
patent: 4791719 (1988-12-01), Kobayashi et al.
patent: 4797648 (1989-01-01), Kaneko et al.
patent: 4816784 (1989-03-01), Rabjohn
patent: 4884156 (1989-11-01), Miyakawa et al.
patent: 4959631 (1990-09-01), Hasegawa et al.
patent: 5047296 (1991-09-01), Miltenberger et al.
patent: 5095357 (1992-03-01), Andoh et al.
patent: 5121852 (1992-06-01), Wilkes
patent: 5169713 (1992-12-01), Kumurdjian
patent: 5221459 (1993-06-01), Okano et al.
patent: 5420558 (1995-05-01), Ito et al.
patent: 5446311 (1995-08-01), Ewen et al.
patent: 5469399 (1995-11-01), Sato et al.
patent: 5530415 (1996-06-01), Takaya
patent: 5583474 (1996-12-01), Mizoguchi et al.
patent: 5609946 (1997-03-01), Korman et al.
patent: 5635892 (1997-06-01), Ashby et al.
patent: 5694030 (1997-12-01), Sato et al.
patent: 5705287 (1998-01-01), Doerner et al.
patent: 5781071 (1998-07-01), Kusunoki
patent: 5801100 (1998-09-01), Lee et al.
patent: 5834825 (1998-11-01), Imai
patent: 5877533 (1999-03-01), Arai et al.
patent: 5892425 (1999-04-01), Kuhn et al.
patent: 5920979 (1999-07-01), Nepela et al.
patent: 5930415 (1999-07-01), Pham
patent: 5952704 (1999-09-01), Yu et al.
patent: 5961746 (1999-10-01), Nepela
patent: 5976715 (1999-11-01), Chen et al.
patent: 6031445 (2000-02-01), Marty et al.
patent: 6033782 (2000-03-01), Hubbard et al.
patent: 6037649 (2000-03-01), Liou
patent: 6040226 (2000-03-01), Wojnarowski et al.
patent: 6067002 (2000-05-01), Fujino et al.
patent: 6103136 (2000-08-01), Han
patent: 6114937 (2000-09-01), Burghartz et al.
patent: 6121852 (2000-09-01), Mizoguchi et al.
patent: 6166422 (2000-12-01), Qian et al.
patent: 6191495 (2001-02-01), Kossives et al.
patent: 6194987 (2001-02-01), Zhou et al.
patent: 6201287 (2001-03-01), Forbes
patent: 6207303 (2001-03-01), Tomita
patent: 6240621 (2001-06-01), Nellissen et al.
patent: 6281560 (2001-08-01), Allen et al.
patent: 6291305 (2001-09-01), Huang et al.
patent: 6392524 (2002-05-01), Biegelsen et al.
patent: 6404317 (2002-06-01), Mizoguchi et al.
patent: 6414564 (2002-07-01), Mizoguchi et al.
patent: 6433299 (2002-08-01), Varshney
patent: 6441715 (2002-08-01), Johnson
patent: 6452247 (2002-09-01), Gardner
patent: 6593841 (2003-07-01), Mizoguchi et al.
patent: 6597593 (2003-07-01), Cruz et al.
patent: 6838863 (2005-01-01), Hazucha et al.
patent: 6856228 (2005-02-01), Gardner
patent: 6870456 (2005-03-01), Gardner
patent: 6891461 (2005-05-01), Gardner
patent: 2001/0052837 (2001-12-01), Walsh
patent: 2003/0001709 (2003-01-01), Visser
patent: 2003/0001713 (2003-01-01), Gardner
patent: 2007/0001762 (2007-01-01), Schrom et al.
patent: 4117878 (1991-12-01), None
patent: 0295028 (1988-12-01), None
patent: 0725407 (1996-08-01), None
patent: 0884783 (1998-12-01), None
patent: 2369694 (1978-05-01), None
patent: 61-20311 (1986-01-01), None
patent: 3-214411 (1991-09-01), None
patent: 5-081615 (1993-04-01), None
patent: 6-124843 (1994-05-01), None
patent: 7-272932 (1995-10-01), None
patent: 2000082621 (2000-03-01), None
patent: 378417 (2000-01-01), None
patent: 386310 (2000-04-01), None
patent: 411481 (2000-11-01), None
United States Patent Application entitled Integrated Inductor, Inventor: Donald S. Gardner.
United States Patent Application entitled Integrated Transformer, Inventor: Donald S. Gardner.
“International Search Report for corresponding PCT Application No. PCT/US2004/011420”, (Oct. 27, 2004), 6 pgs.
Baba, M., “GHz-Drive Magnetic Thin-Film Inductor Using CoNbZr Film”,Journal of the Magnetics Society of Japan, 24(4-2), (2000),879-882.
Brandon, E., “Microinductors for Sacecraft Power Eectronics”,6th International Symposium, Magnetic Materials, Processes and Device VI Applications to Storage and Microelectromechanical systems(MEMS), vol. 2000-29, The Electrochemical Society, Inc., Pennington, New Jersey,(2001),559-567.
Fessant, A., et al., “Influence of In-Plane Anisotropy and Eddy Currents on the Frequency Spectra of the Complex Permeability of Amorphous CoZr Thin Films”,IEEE Transactions on Magnetics, 29(1), (Jan. 1993),82-87.
Gardner, D., “High Frequency (GHz) and Low Resistance Integrated Inductors Using Magnetic Materials”,Proceedings of the IEEE 2001 International Interconnect Technology Conference, (Jun. 2001), 101-103.
Gardner, D., “Mechanical Stress as a Function of Temperature for Aluminum Alloy Films”,Journal of Applied Physics, 67(4), (Feb. 15, 1990), 1831-1845.
Kobayashi, Y., “New Type Micro Cloth-Inductor and Transformer With Thin Amorphous Wires and Multi-Thin Coils”,IEEE Transactions on Magnetics, 28(5), (Sep. 1992),3012-3014.
Korenivski, V., “Magnetic Film Inductors for Radio Frequency Applications”,Journal of Applied Physics, 82(10), (Nov. 15, 1997),5247-5254.
Long, J., “The Modeling, Characterization, and Design of Monolithic Inductors for Silicon RF IC's”,IEEE Journal of Solid-State Circuits, 32(2), (Mar. 1997), 357-369.
Matsuki, H., “A New Cloth Inductor Using Amorphous Fiber”,IEEE Transactions on Magnetics, 21(5), (Sep. 1985), 1738-1740.
Matsumoto, S., “Integration of a Power Supply for System-on-Chip”,IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences, vol. E80-A, No. 2, (Feb. 1997), 276-282.
Mino, M., et al., “A New Planar Microtransformer for Use in Micro-Switching Converters”,IEEE Transactions on Magnetics, 28(4), (Jul. 1992), 1969-1973.
Mino, M., et al., “Planar Microtransformer With Monolithically-Integrated Rectifier Diodes for Micro-Switching Converters”,IEEE Transactions on Magnetics, 32(2), Mar. 1996, 291-296.
Mohan, S., “Bandwidth Extension in CMOS With Optimized On-Chip Inductors”,IEEE Journal of Solid-State Circuits, 35(3), (Mar. 2000), 346-355.
Mohan, S., “Simple Accurate Expressions for Planar Spiral Inductances”,IEEE Journal of Solid-State Circuits, 34(10), (Oct. 1999), 1419-1424.
Niknejad, A., “Analysis, Design, and Optimization of Spiral Inductors and Transformers Si RF IC's”,IEEE Journal of Solid-State Circuits, 33(10), (Oct. 1998),1470-1481.
O'Donnell, T., “Microtransformers and Inductors using Permalloy Thin Films”,Preparation, Properties, and Applications of Thin Ferromagnetic Films, http://www.iemw.tuwien.ac.at/publication/workshop0600/ODonnell.html, (Jun. 2000), 45-52.
Oshiro, O., et al., “A Novel Minature Planar Inductor”,IEEE Transactions on Magnetics, vol. Mag-23, No. 5, (1987),3759-3761.
Park, J. Y., et al., “Batch-Fabricated Microinductors With Electroplated Magnetically Anisotropic and Laminated Alloy Cores”,IEEE Transactions on Magnetics, 35(5), (Sep. 1999),4291-4300.
Sato, T., “New Applications Nanocrystalline Fe(Co-Fe)Hf-O Magnetic Films to micromagnetic devices”,Journal of Applied Physics, 83(11), (Jun. 1, 1998),6658-6660.
Shirakawa, K., “Thin Film Cloth-Structured Inductor for Magnetic Integrated Circuit”,IEEE Transactions on Magnetics, 26(5), (Sep. 1990), 2262-2264.
Tomita, H., “Oblique-Field Annealing Effect for In-Plane Magnetic Anisotropy of Soft Magnetic Co-Nb-Zr Thin Films”,IEEE Transactions on Magnetics, 30(3), (May 1994),1336-1339.
Yabukami, S., “Noise Analysis of a MHz-3 GHz Magnetic Thin Film Permeance Meter

Affiliated with

Also associated with

Rating

On-die micro-transformer structures with magnetic materials does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with On-die micro-transformer structures with magnetic materials, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and On-die micro-transformer structures with magnetic materials will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4155533