On-chip temperature sensor utilizing a Schottky barrier diode st

Details On-chip temperature sensor utilizing a Schottky barrier diode st On-chip temperature sensor utilizing a Schottky barrier diode st

1991-08-29

1992-10-13

Cuchlinski, Jr., William A.

Thermal measuring and testing

Temperature measurement

By electrical or magnetic heat sensor

357 10, 357 15, 357 28, G01K 700, H01L 31108, H01L 2714

Patent

active

051545144

ABSTRACT:
A temperature sensor, comprising: a diode structure including, a) a silicon substrate, b) a first region of a metal silicide in the silicon substrate, c) a second region of a metal-oxide semiconductor material on the first region, d) a third region of a metal over the second region; and, means for using the diode structure as a temperature sensitive device to measure an ambient temperature. The metal-oxide semiconductor material is preferably selected to have a bandgap of not less than about 3.0 eV.

REFERENCES:
patent: 3719797 (1973-03-01), Andrews, Jr. et al.
patent: 3812717 (1974-05-01), Miller et al.
patent: 3906540 (1975-09-01), Hollins
patent: 4206472 (1980-06-01), Chu et al.
patent: 4361599 (1982-11-01), Wourms
patent: 4394672 (1983-07-01), Meitzler et al.
patent: 4533935 (1985-08-01), Mochizuki
patent: 4544939 (1985-10-01), Kosonocky et al.
patent: 4619035 (1986-10-01), Hotta et al.
patent: 4643589 (1987-02-01), Krause et al.
patent: 4698659 (1987-10-01), Mizutani
patent: 4714951 (1987-12-01), Baudrant et al.
patent: 4744672 (1988-05-01), Tursky et al.
patent: 4808009 (1989-02-01), Sittler et al.
patent: 4854731 (1989-08-01), Jenkins
patent: 4857973 (1989-08-01), Yang et al.
patent: 4882296 (1989-11-01), Hoheisel et al.

Affiliated with

Also associated with

Rating

On-chip temperature sensor utilizing a Schottky barrier diode st does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with On-chip temperature sensor utilizing a Schottky barrier diode st, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and On-chip temperature sensor utilizing a Schottky barrier diode st will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1296280