Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2006-10-17
2009-10-20
Souw, Bernard E (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S281000, C250S282000, C250S287000, C315S005340, C315S005370, C315S351000, C257S249000
Reexamination Certificate
active
07605377
ABSTRACT:
A microelectronics apparatus comprising a substrate, a pair of grid electrodes coupled to the substrate on opposing sides of a central axis, wherein the grid electrodes are substantially parallel to each other and extend substantially perpendicular from the substrate, and a plurality of ion reflection lenses each coupled to the substrate, wherein each ion reflection lens: (1) is substantially perpendicular to each of the grid electrodes; (2) extends substantially perpendicular from the substrate; and (3) has an aperture aligned with the central axis.
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Tsui Kenneth
Verbeck, IV Guido Fridolin
Haynes and Boone LLP
Souw Bernard E
Zyvex Corporation
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