On-chip microplasma systems

Optics: measuring and testing – With plural diverse test or art

Reexamination Certificate

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Reexamination Certificate

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07746451

ABSTRACT:
On-chip microplasma discharge devices capable of producing light, including ultraviolet light, capable of detecting atomic and molecular gas, and capable of detecting atomic and molecular contaminants in water samples. The on-chip microplasma discharge devices utilize nanoparticles or magnets to tune or confine microplasma discharges generated by electrodes delivering a voltage to the device. Selective control of the gaseous pressure at a value between atmospheric pressure and a vacuum pressure allows for further refinement of gas or contaminant detection, or for further tuning of the wavelength of the light to be produced.

REFERENCES:
patent: 2006/0022136 (2006-02-01), Moore
patent: 2006/0051505 (2006-03-01), Kortshagen et al.
M. Bhaskar, C. Wilson, L.Que, Y. Gianchandani, “A Micro-Fluidic Ultra-Violet Emission Source for Direct Fluorescence of Tryptophan”, IEEE EMBS, 2003, 3380-3383.
L. Que, C. Wilson, Y. Gianchandani, “Microfluidic Electrodischarge Devices with Integrated Dispersion Optics for Spectral Analysis of Water Impurities”, Journal of Microelectromechanical Systems, 2005, 185-191, vol. 14, No. 2.
J. Sweeney, C. Wilson, “A Dusty Microplasma Spectroscopic Microdevice for On-site Water Chemistry Analysis”, Louisiana Materials and Emerging Technologies Conf., Oct. 2006.
C. Wilson, Y. Gianchandani, “LEd-SpEC: Spectroscopic Detection of Water Contaminants Using Glow Discharges from Liquid Microelectrodes”, IEEE, 2002, 248-251.
C. Wilson, Y. Gianchandani, “Miniaturized Magnet Nitrogen DC Microplasmas”, IEEE Transactions on Plasma Science, 2004, 282-287, vol. 32, No. 1.
C. Wilson, Y. Gianchandani, R. Arslanbekov, V. Kolobov, A. Wendt, “Profiling and Modeling of DC Nitrogen Microplasmas”, Journal of Applied Physics, 2003, 2845-2351, vol. 94, No. 5.
C. Wilson, Y. Gianchandani, “Spectral Detection of Metal Contaminants in Water Using an On-Chip Microglow Discharge”, IEEE Transactions on Electron Devices, 2002, 2317-2322, vol. 49, No. 12.

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