Recorders – Printing – dotting – or punching marker – Ink transfer support or moving means
Patent
1990-01-31
1992-02-11
Reinhart, Mark J.
Recorders
Printing, dotting, or punching marker
Ink transfer support or moving means
73375, G01D 942, G01M 302
Patent
active
050879278
ABSTRACT:
A lithography tool having an improved focus system. The focus system comprises a lens mounted in a nosepiece which defines a chamber. The chamber defines an onifice through which the lens system may see a workpiece. An air supply is provided to supply a regulated and measured air flow to the chamber. By measuring the air flow into the chamber, the rate of air flow through the orifice may be determined. The rate of air flow through the orifice is proportional to the gap between the orifice and a workpiece.
REFERENCES:
patent: 3903735 (1975-09-01), Wilson
patent: 4142401 (1979-03-01), Wilson
patent: 4796038 (1989-01-01), Allen et al.
patent: 4801352 (1989-01-01), Piwczyk
Silicon Processing for the VLSI Era. vol. 1, Process Technology, Stanley Wolf and Richard N. Tauber, Lattice Press, 1987, pp. 493-505.
Christenson Eric
Holstrom Bob
Mino, Jr. Eugene
Thomas Tim
Ateo Corporation
Reinhart Mark J.
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