Omega-type energy filter

Details Omega-type energy filter Omega-type energy filter

1996-11-27

1998-09-22

Nguyen, Kiet T.

Radiant energy

Electron energy analysis

250396ML, H01J 4946

Patent

active

058118012

ABSTRACT:
An omega-type energy filter of the B-type in which a beam of charged-particles is focused three times in a direction perpendicular to the direction of magnetic fields and twice in the direction of the magnetic fields. The geometry is so designed that this B-type produces smaller aberrations and larger energy dispersion than the A-type. The filter has four sector magnets M.sub.1, M.sub.2, M.sub.3, and M.sub.4 for successively deflecting the charged-particle beam passed through an entrance aperture and for directing the beam toward an exit slit. The entrance aperture and the exit slit are arranged symmetrically with respect to a central, symmetrical plane. The sector magnets M.sub.1 and M.sub.4 are arranged symmetrically with respect to the symmetrical plane. The sector magnets M.sub.2 and M.sub.3 are arranged symmetrically with respect to the symmetrical plane. The entrance aperture and the entrance face of the sector magnet M.sub.1 are separated by a distance of L.sub.5. The exit face of the sector magnet M.sub.4 and the exit slit are separated by the same distance of L.sub.5. Relations given by ##EQU1## are satisfied.

REFERENCES:
patent: 4740704 (1988-04-01), Rose et al.
patent: 5126565 (1992-06-01), Rose
patent: 5177361 (1993-01-01), Krahl et al.
patent: 5449914 (1995-09-01), Rose et al.
patent: 5585630 (1996-12-01), Taniguchi et al.
"High-Resolution imaging magnetic energy filters with simple structure", S. Lanio, Optik 73, No. 3 (1986), pp. 99-107.

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