Omega-type energy filter

Details Omega-type energy filter Omega-type energy filter

1998-02-27

1999-09-21

Nguyen, Kiet T.

Radiant energy

Electron energy analysis

250396ML, H01J 4946

Patent

active

059557320

ABSTRACT:
There is disclosed a small-sized omega-type energy filter having reduced drift lengths and an increased merit function. Four magnetic fields M.sub.1, M.sub.2, M.sub.3, and M.sub.4 deflect the electron beam into an .OMEGA.-shaped orbit from the entrance window plane to the slit plane. The distance L.sub.4 from the exit end surface of the third field M.sub.3 to the entrance end surface of the fourth field M.sub.4 is set no greater than 50 .sqroot.U*/.sqroot.U*(200) mm. The deflection angle .PHI. is set to a range of from 120.degree.-50.degree. to 120.degree.+5.degree.. The distance L.sub.3 from the central plane between the second field M.sub.2 and the third field M.sub.3 to the entrance end surface of the third field M.sub.3 is set such that 20 .sqroot.U*/.sqroot.U*(200) mm .gtoreq.10.sqroot.U*/.sqroot.U*(200) mm. The distance L.sub.5 from the exit end surface of the fourth field M.sub.4 to the slit plane is set such that 30 .sqroot.U*/.sqroot.U*(200) mm.ltoreq.L.sub.5 .ltoreq.50 .sqroot.U*/.sqroot.U*(200) mm.

REFERENCES:
patent: 5811801 (1998-09-01), Tsuno
"High-Resolution imaging magnetic energy filters with simple structure", S. Lanio, Optik, 78, No. 3 (1986), pp. 99-107.
"Design of an omega filter for a 200 kv electron microscope", K. Tsuno and E. Munro, Rev. Sci. Instrum., 68 (1), Jan. 1997, pp. 109-115.

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