Oil free vacuum system

Details Oil free vacuum system Oil free vacuum system

1984-05-11

1986-03-25

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

62100, 62268, 55269, 417901, B01D 800

Patent

active

045774650

ABSTRACT:
An oil free vacuum system 10 which comprises a high thermal capacitance cryopump 12 and air ejector 38. The air ejector 38 is used to reduce load lock chamber 16 pressure to an intermediate vacuum. Cryopump 12 further evacuates chamber 12 to the operating vacuum of a work chamber 14. The work chamber 14 is maintained at high vacuum by a main cryopump 20. The main cryopump can be started in an oil free manner through the use of air ejector 38 and high thermal capacitance cryopump 12. A high themal capacitance, high thermal conductance cryopanel is formed of a lead/copper sandwich.

REFERENCES:
patent: 3010285 (1961-11-01), Penn
patent: 3137551 (1964-06-01), Mark
patent: 3262279 (1966-07-01), Moore, Jr.
patent: 3485054 (1969-12-01), Hogan
patent: 3630051 (1971-12-01), Martin
patent: 4406130 (1983-09-01), Hemmerich
patent: 4446702 (1984-05-01), Peterson et al.
P. W. Erdman and E. C. Zipf, "Closed-Cycle Cryogenic Pump Suitable for Sounding Rockets Use", Rev. Sci. Instrum., 53(1), Jan., 1982, pp. 106-107.

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