Oil free scroll vacuum pump

Rotary expansible chamber devices – Working member has planetary or planetating movement – Helical working member – e.g. – scroll

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Details

277 27, 277 961, F04C 1804, F04C 2700, F16J 1502, F16J 1548

Patent

active

053663586

ABSTRACT:
The invention relates specifically to a simplified and subsequently improved method to produce a scroll type vacuum pump that is capable of achieving vacuum pressures below 1 torr through the placement of at least one dynamic orbital vacuum seal between the two scroll halves at the outside diameter of the scroll spirals to prevent atmospheric gas from entering. Prior to this invention, in order to achieve vacuum pressures less than 1 torr with a scroll pump it has been necessary to either seal the two scroll halves with a large diameter metal bellows that accommodates the required orbital travel or to locate the orbiting scroll plate or plates and the components that convert the rotary drive to the required orbital motion inside the vacuum space with a dynamic vacuum seal on the rotary drive shaft. Both of these designs have been expensive to produce, limiting the application of scroll technology in the vacuum industry to special applications.

REFERENCES:
patent: 3994633 (1976-11-01), Shaffer
patent: 4192152 (1980-03-01), Armstrong et al.
patent: 4199308 (1980-04-01), McCullough
patent: 4883413 (1989-11-01), Perevuznik et al.
patent: 5129798 (1992-07-01), Crum et al.

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