Oil filtration and exhaust apparatus

Details Oil filtration and exhaust apparatus Oil filtration and exhaust apparatus

1990-09-13

1991-10-01

Jones, W. Gary

Liquid purification or separation

With alarm, indicator, register, recorder, signal or...

Transparent

210168, 210188, 210317, 210335, 2104165, 210489, 210496, 55186, 55196, 55518, 55526, 418 2, 418 85, 418 88, 418 89, 418DIG1, B01D 1900

Patent

active

050531220

ABSTRACT:
An oil filtration and exhaust apparatus for filtering particulates and gases from the recirculating oil of a vacuum pump which is adapted to remove gases from a process enclosure. The oil filtration and exhaust apparatus removes particulates and gases from the recirculating oil by means of particulate filters and a gas scrubbing filter. Additionally, the exhaust gases are demisted prior to exhaust to an exhaust header. The apparatus is particularly suited to semiconductor manufacturing processes.

REFERENCES:
patent: 2227441 (1941-01-01), Coleman
patent: 3327936 (1967-06-01), Rollinger
patent: 4228004 (1980-10-01), Foster
patent: 4475876 (1984-10-01), Olen
patent: 4761166 (1988-08-01), Kitchener et al.

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