Measuring and testing – Fluid pressure gauge – Diaphragm
Reexamination Certificate
2000-03-16
2001-12-18
Oen, William (Department: 2855)
Measuring and testing
Fluid pressure gauge
Diaphragm
Reexamination Certificate
active
06330829
ABSTRACT:
FIELD OF INVENTION
The present invention relates to pressure sensing devices, and more particularly to an oil-filled pressure transducer adapted for use in hostile environments which subject the transducer to harsh resonances.
BACKGROUND OF INVENTION
Oil-filled transducers are well known in the art. It is also well known that resonances can occur within a pressure cavity and be transferred through an isolation diaphragm, through the oil-filled cavity to a sensor itself. In extreme conditions these resonances can exert significant stresses on gold wires bonded to the sensor chip sufficient to cause either ball bonds to fracture or the gold wire itself to fail. In addition, when the transducer is used to measure a differential pressure across a pump, large pressure pulses result when cavitation occurs in the pump, which can also cause similar results. In any event, for a variety of reasons severe pressure spikes may be transmitted through the oil of an oil-filled pressure transducer putting excess stress on gold wires of the sensor as well as generating excessive stresses in the sensor itself, undesirably resulting in premature failure of the sensor.
It is therefore an object of the present invention to render such excess stresses harmless to the sensor to insure its survivability under these adverse conditions.
SUMMARY OF INVENTION
A differential pressure transducer including: a housing having a first end containing a first recess, an oppositely disposed second end containing a second recess; first and second isolation diaphragms respectively enclosing said first and second recesses and forming in conjunction therewith first and second cavities; first and second headers secured within said housing and being electronically coupled together; and, a silicon sensor secured to said first header so as to isolate said first and second cavities from one another and being responsive to a first pressure applied to said first diaphragm and a second pressure applied to said second diaphragm to produce at least one signal indicative of a difference between said first and second pressures and being adapted to withstand an excess in either said first or second pressures.
REFERENCES:
patent: 5286671 (1994-02-01), Kurtz et al.
patent: 5891751 (1999-04-01), Kurtz et al.
patent: 5955771 (1999-09-01), Kurtz et al.
patent: 5973590 (1999-10-01), Kurtz et al.
Gardner Robert
Kurtz Anthony D.
Kulite Semiconductor Products Inc.
Morris Duane
Oen William
Plevy Arthur L.
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