Coating processes – Electrical product produced – Condenser or capacitor
Patent
1979-09-27
1982-12-28
Smith, John D.
Coating processes
Electrical product produced
Condenser or capacitor
427125, 357 67, 357 71, 29569L, H01L 2128, B05D 512
Patent
active
043661866
ABSTRACT:
An ohmic contact to a semiconductor device comprising p-type InP is formed by sequentially depositing beryllium-gold and gold layers on InP and then heat-treating the device at a temperature less than 440 degrees C. An ohmic contact to p-type InGaAsP can be similarly formed.
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patent: 3620847 (1971-11-01), Wise
patent: 3850688 (1974-11-01), Halt
patent: 4011583 (1977-03-01), Levinstein et al.
patent: 4022931 (1977-05-01), Black et al.
patent: 4218271 (1980-08-01), Wood
patent: 4258375 (1981-03-01), Hsieh et al.
patent: 4260429 (1981-04-01), Moyer
Bergh et al., Light-Emitting Diodes, Clarendon Press, Oxford, 1976, pp. 441, 456.
Schumaker et al., "Dicing Induced Damage in GaP Electroluminescent Diodes", Journal of the Electrochemical Society, vol. 119, No. 9, Sep. 1972, p. 1233.
Schiavone et al., "Ohmic Contacts for Moderately Resistive p-Type InP", Journal of Applied Physics, vol. 46, No. 1, Jan. 1975, pp. 452-453.
Ho et al., "Stable Junctions Between GaAs Semiconductors and Metal Contacts Using a Metallic Compounds as a diffusion Barrier", IBM Tech. Disclosure Bulletin, vol. 21, No. 4, Sep. 1978, p. 1752.
Keramidas Vassilis G.
McCoy Robert J.
Temkin Henryk
Bell Telephone Laboratories Incorporated
Laumann Richard D.
Plantz Bernard F.
Smith John D.
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