Off-axis projection optics and extreme ultraviolet...

Optical: systems and elements – Lens – With field curvature shaping

Reexamination Certificate

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C359S651000

Reexamination Certificate

active

11358074

ABSTRACT:
Off-axis projection optics that includes first and second mirrors positioned off-axis and sharing a confocal point that are arranged to reduce linear astigmatism. If a distance between an object plane and the first mirror is l1, an incident angle of light coming from the object plane to the first mirror is i1, a distance between the first mirror and the confocal point is l1′, a distance between the confocal point and the second mirror is l2, an incident angle of light coming from the first mirror to the second mirror is i2, and a distance between the second mirror and an image plane is l2′, the off-axis projection optics may satisfy the following equation:l1′+l1l1⁢tan⁢⁢i1=l2′+l2l2⁢tan⁢⁢i2.

REFERENCES:
patent: 5063586 (1991-11-01), Jewell et al.
patent: 6710917 (2004-03-01), Mann et al.
patent: 6860610 (2005-03-01), Terasawa

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