Off-axis light beam defect detector

Details Off-axis light beam defect detector Off-axis light beam defect detector

1981-09-08

1983-11-01

Sikes, William L.

Optics: measuring and testing

Inspection of flaws or impurities

Having predetermined light transmission regions

356371, 369 45, G01N 2188

Patent

active

044127430

ABSTRACT:
A method and apparatus for detecting a property such as a defect in a surface to be scanned. A focusing, or objective lens is provided together with a subsystem for maintaining a substantially fixed distance between the focusing lens and the scanned surface. Scanning is effected by providing lateral movement between the lens and the surface. An off-axis light beam source is provided having a beam of light which is directed to pass through the lens to the scanned surface. A light beam sensing element is positioned so as to detect that portion of the light beam reflected off of the surface and transmitted back through the lens.

REFERENCES:
patent: 4030835 (1977-06-01), Firester et al.
patent: 4085423 (1978-04-01), Tsunoda et al.

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