Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2007-04-10
2007-04-10
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S053000, C355S077000
Reexamination Certificate
active
10918700
ABSTRACT:
In an off-axis levelling procedure a height map of the substrate is generated at a measurement station. The height map is referenced to a physical reference surface of the substrate table. The physical reference surface may be a surface in which is inset a transmission image sensor. At the exposure station the height of the physical reference surface is measured and related to the focal plane of the projection lens. The height map can then be used to determine the optimum height and/or tilt of substrate table to position the exposure area on the substrate in best focus during exposure. The same principles can be applied to (reflective) masks.
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Boonman Marcus E. J.
Du Croo de Jongh Richard J. H.
Heuts Frederik T. E.
Klinkhamer Jacob F. F.
Modderman Theodorus M.
ASML Netherlands B.V.
Kim Peter B.
Pillsbury Winthrop Shaw & Pittman LLP
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