Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2005-04-19
2005-04-19
Kim, Peter B. (Department: 2851)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S053000, C355S077000
Reexamination Certificate
active
06882405
ABSTRACT:
In an off-axis levelling procedure a height map of the substrate is generated at a measurement station. The height map is referenced to a physical reference surface of the substrate table. The physical reference surface may be a surface in which is inset a transmission image sensor. At the exposure station the height of the physical reference surface is measured and related to the focal plane of the projection lens. The height map can then be used to determine the optimum height and/or tilt of substrate table to position the exposure area on the substrate in best focus during exposure. The same principles can be applied to (reflective) masks.
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Jasper Johannes Christiaan Maria
Modderman Theodorus M
Nijmeijer Gerrit Johannes
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