Off-axis catadioptric projection optical system for lithography

Details Off-axis catadioptric projection optical system for lithography Off-axis catadioptric projection optical system for lithography

2009-02-20

2010-11-16

Fuller, Rodney E (Department: 2862)

Photocopying

Projection printing and copying cameras

Reflector between original and photo-sensitive paper

C355S053000

Reexamination Certificate

active

07834979

ABSTRACT:
An off-axis catadioptric projection optical systems for use in lithography tools for processing modulated light used to form an image on a substrate is provided. The optical system includes an off-axis mirror segment, a fold mirror, a relay, an aperture stop and a refractive lens group. Modulated light is transmitted through the system to form an image on a substrate. The projection system includes an off-axis mirror segment, an aperture stop and a refractive lens group. Alternatively, the projection system includes an off-axis mirror segment, a negative refractive lens group, a concave mirror, a relay, an aperture stop, and a refractive lens group.

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