Observation device and an aligner using same

Details Observation device and an aligner using same Observation device and an aligner using same

1983-11-21

1987-04-07

Rosenberger, R. A.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

355 53, G01B 1100

Patent

active

046556010

ABSTRACT:
An observation device usable with an apparatus for aligning two members each having alignment marks. The device includes an optical path for the beam reflected by the alignment marks, which at least partially is not common with an optical path for the beam directed to the alignment marks. In the uncommon optical path for the scanning beam or for the reflected beam, there is a 90 degree image rotator to provide, in the observation view field, a scanning direction which is traverse to a direction connecting the alignment marks, thus enabling an operator to observe images in natural forms.

REFERENCES:
patent: 4165149 (1979-08-01), Suzki et al.
patent: 4278893 (1981-07-01), Kato et al.

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