Obliquely deposited film element

Details Obliquely deposited film element Obliquely deposited film element

1997-07-11

1999-08-03

Speer, Timothy M.

Stock material or miscellaneous articles

Composite

Of quartz or glass

428428, 428432, 428696, 428701, 428702, 359359, B32B 1700

Patent

active

059323540

ABSTRACT:
By providing a normally deposited layer as a buffer layer between a substrate and an obliquely deposited layer, it is possible to prevent contaminants on the substrate from diffusing into the obliquely deposited layer. Also, by providing a normally deposited layer as a passivation layer on the uppermost obliquely deposited layer, absorption of water vapor in the air by the obliquely deposited layer is prevented. Further, by forming a laminated object comprising obliquely deposited layers and dense normally deposited layers, strength of each obliquely deposited layer itself is increased and relaxation of its columnar structure can be suppressed with certainty because both the diffusion of contaminants from the substrate and the absorption of water in the air is prevented. Thus, by removing factors to accelerate the relaxation of columnar structure in the obliquely deposited layer, clouding of the obliquely deposited film layer can be prevented.

REFERENCES:
patent: 4813768 (1989-03-01), Hamaguchi et al.
patent: 4874664 (1989-10-01), Hamaguchi et al.

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