Objective lens with large field deflection system and homogeneou

Details Objective lens with large field deflection system and homogeneou Objective lens with large field deflection system and homogeneou

1995-05-05

1997-03-25

Wieder, Kenneth A.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

250310, G01R 31305

Patent

active

056148330

ABSTRACT:
A method of noncontact testing and an electron optical system includes an electron source for producing a high energy electron beam, a retarding field objective lens system for receiving and focussing the high energy electron beam to produce a focussed low energy electron beam, and a magnetic deflector for deflecting the focussed low energy electron beam to the sample, thereby to expose the sample to the low energy electron beam, and simultaneously maintaining a predetermined spot size of the beam. The retarding field objective lens system includes a device for retarding electrons in the low energy electron beam directed to the sample and for accelerating electrons, emitted by the sample upon being irradiated by the low energy electron beam.

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Munro, E., et al.; "High Resolution, Low-Energy Beams by means of Mirror Optics"; J. Vac. Sc. Technol. B vol. 6, No. 6, Nov./Dec. 1988.
Frosien, et al.; "Compound Magnetic and Electrostatic Lenses for Low-Voltage Applications"; J. Vac. Sci. Technol. B vol. 7, No. 6, Nov./Dec. 1989.

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