Objective lens simultaneously optimized for pupil ghosting,...

Details Objective lens simultaneously optimized for pupil ghosting,... Objective lens simultaneously optimized for pupil ghosting,...

2011-01-25

2011-01-25

Harrington, Alicia M (Department: 2873)

Optical: systems and elements

Lens

Microscope objective

C359S370000

Reexamination Certificate

active

07876505

ABSTRACT:
An objective lens includes multiple optical elements disposed between a first end and a second end, each optical element oriented along an optical axis. Each optical surface of the multiple optical elements provides an angle of incidence to a marginal ray that is above a minimum threshold angle. This threshold angle minimizes pupil ghosts that may enter an interferometer. The objective lens also optimizes wavefront delivery and pupil imaging onto an optical surface under test.

REFERENCES:
patent: 5818632 (1998-10-01), Stephenson
patent: 7336370 (2008-02-01), Olczak et al.
patent: 2008/0106696 (2008-05-01), Buckland et al.

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