Patent
1988-02-11
1989-09-05
Henry, Jon W.
350527, 350247, 350130, 350320, 350 63, 350255, G02B 2610, G02B 704, G02B 2702, G02B 2118
Patent
active
048632520
ABSTRACT:
The objective lens in a confocal tandem scanning reflected light microscope is movable relative to the specimen stage by piezoelectric actuators controlled by a closed-loop feedback control system having eddy current sensors to detect lens position. Position control input is either manual or automatic.
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Aeschbach James F.
McCarthy Jon J.
Henry Jon W.
Tracor Northern, Inc.
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