Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1989-03-06
1990-05-15
Berman, Jack I.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
250397, 250310, H01J 3712, H01J 37145, H01J 37244
Patent
active
049260545
ABSTRACT:
An objective lens which is a component of a scanning electron microscope and wherein the electron source or the intermediate image of the electron source is reduced by condenser lenses is imaged onto a specimen (PR). The objective lens comprises an asymmetrical magnetic lens (ML), an electrostatic immersion lens (OE/UE) superimposed on the magnetic lens (ML), and electrode (ST) which is connected to a variable potential (U.sub.ST) so as to control the intensity of the current of secondary (SE) and back-scattered electrodes released from the specimen (PR), and a detector (DT) mounted immediately above the magnetic lens (ML). The electrodes (OE, UE) of the immersion lens are connected to potentials so that an electrical field which decelerates the primary electrons (PE) is formed inside the objective lens.
REFERENCES:
patent: 4596929 (1986-06-01), Coates et al.
patent: 4831266 (1989-05-01), Frosien et al.
Application Ser. No. 120,133, Ser. No. 030,964 and Ser. No. 150,245, (corponding to U.S. Pat. Nos. 4,812,651, 4,785,176, and 4,896,036 respectively).
Berman Jack I.
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterprufte
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