Objective lens and method of measuring its performance

Details Objective lens and method of measuring its performance Objective lens and method of measuring its performance

1994-07-11

1996-03-19

Housel, James C.

Optical: systems and elements

Lens

359756, 359761, 359754, 356124, 356359, G02B 900, G02B 962, G01B 1100

Patent

active

055007678

ABSTRACT:
An objective lens is corrected for spherical aberration at both an operating wavelength and a measurement wavelength, such that the amount of spherical aberration to develop at the operating wavelength is substantially equal to the amount of spherical aberration to develop at a measuring wavelength. The method of lens performance measurement then uses a light source emitting at a wavelength different from the operating wavelength.

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