Material or article handling – Horizontally swinging load support – Swinging about pivot
Patent
1987-03-16
1989-03-21
Spar, Robert J.
Material or article handling
Horizontally swinging load support
Swinging about pivot
901 19, 74570, B28J 906
Patent
active
048138452
ABSTRACT:
An object transport apparatus (10) is provided for the purpose of transporting an object (19), usually a semiconductor wafer, to various points within a planar circular zone (Z). The transport apparatus (10) includes a motive power subassembly (12) for generating rotational motion and delivering it to an arm subassembly (14) rotating about an elbow axis (20) and, through an eccentric drive subassembly (110) to a hand subassembly (16) adapted to support to wafer (19). The hand subassembly (16) rotates about a wrist axis (21) which is parallel to but displaced from the elbow axis (20) in an independent fashion from the rotation of the arm subassembly (14). The eccentric drive subassembly (110) incorporates complimentary pairs of cam drivers (111, 112) connected by cam linkages (120, 122) to deliver rotational motion from the elbow axis (20) to the wrist axis (21). The apparatus (10) is particularly useful in the semiconductor manufacturing field where it may be used for a variety of tasks, primarily in delivering wafers (19) from one workstation position to another in a precisely controllable manner.
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A G Associates advertisement for "HEATPULSE 2101".
SCSS Instruments advertisement for "Class 1" Wafer Transfer Arm.
Advanced Control Engineering, Inc.
Hughes Michael J.
Spar Robert J.
Underwood Donald W.
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