Coating apparatus – Control means responsive to a randomly occurring sensed... – Condition of coated material
Reexamination Certificate
2007-06-28
2011-11-08
Yuan, Dah-Wei D (Department: 1717)
Coating apparatus
Control means responsive to a randomly occurring sensed...
Condition of coated material
C118S728000, C118S72300R
Reexamination Certificate
active
08051799
ABSTRACT:
An apparatus includes a housing defining a chamber in which an electric field is generated, and an internal member provided in the chamber. At least one part of the internal member is formed of a dielectric material. A process is executed in the chamber so that a dielectric deposit is formed on the at least one part of the internal member. An m1(d∈1/dm1) value of the dielectric material and an m2(d∈2/dm2) value of the dielectric deposit are set so that production of particles from the deposit is properly controlled. The term m1is a mass density of the dielectric material, ∈1is a permittivity of the dielectric material, m2is a mass density of the dielectric deposit, and ∈2is a permittivity of the dielectric deposit.
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Itagaki Yousuke
Ito Natsuko
Uesugi Fumihiko
Hilton Albert
Renesas Electronics Corporation
Young & Thompson
Yuan Dah-Wei D
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