Object positioning process and apparatus

Details Object positioning process and apparatus Object positioning process and apparatus

1974-12-23

1977-10-04

Gruber, Felix D.

Boots, shoes, and leggings

250566, 355 86, 356172, 364300, 364468, G06F 1546, H05K 1300

Patent

active

040526038

ABSTRACT:
Objects, such as a pattern mask and a photoresist coated substrate, are placed in translational and/or rotational alignment by a system in which a target on one object is successively aligned to two targets on the other object so that the accuracy of each alignment can be verified. The system compares a known stored distance between alignment targets with the distance determined from the successive alignments. When the distances agree within a preselected tolerance, then the objects are moved into alignment.

REFERENCES:
patent: 3476476 (1969-11-01), Chitayat
patent: 3490846 (1970-01-01), Kasper
patent: 3563648 (1971-02-01), Baggaley
patent: 3598978 (1971-08-01), Rempert
patent: 3718396 (1973-02-01), Hennings
patent: 3752589 (1973-08-01), Kobayashi
patent: 3796497 (1974-03-01), Mathisen et al.
patent: 3844655 (1974-10-01), Johannsmeier
patent: 3955072 (1976-05-01), Johannsmeier

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