Object measuring apparatus using lightwave interference

Details Object measuring apparatus using lightwave interference Object measuring apparatus using lightwave interference

1992-04-28

1992-12-08

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356345, G01B 902

Patent

active

051702177

ABSTRACT:
An object measuring apparatus uses lightwave interference by coherent beams. A single light beam having two lightwave components with a phase difference that changes in time is divided so that one lightwave component is applied to the object and the other lightwave component is applied to a reference surface. The lightwave components for the object and the reference surface are interfered with each other and a change in the interference light is detected.

REFERENCES:
patent: 4139304 (1979-02-01), Redman et al.
patent: 4340304 (1982-04-01), Massie

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