Object fixturing in interferometer

Details Object fixturing in interferometer Object fixturing in interferometer

1996-04-18

1997-11-04

Font, Frank G.

Optics: measuring and testing

By polarized light examination

With birefringent element

356305, 356354, G01B 902

Patent

active

056845944

ABSTRACT:
An object fixturing system applies to an interferometer having a pair of diffraction gratings arranged to produce and recombine test and reference beams. The fixturing system positions an object between the diffraction gratings so that a test beam is incident on a surface of the object at a grazing incidence angle. A positioning fixture engages the object and a reference surface of the interferometer in moving the object to a measurement position on a window platform that transmits the test and reference beams. The fixture is then removed for a simultaneous measurement of an entire surface of the object, which can be clamped in place if necessary by a clamping window that also transmits the test and reference beams.

REFERENCES:
patent: 4844614 (1989-07-01), Henderson et al.
patent: 5530547 (1996-06-01), Arnold
"Grazing incidence interferometry applied to the measurement of cylindrical surfaces" by Thomas Dresel et al., Optical Engineering, Dec. 1995, vol. 34, No. 12, pp. 3531-3535.

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