Radiation imagery chemistry: process – composition – or product th – Diazo reproduction – process – composition – or product – Composition or product which contains radiation sensitive...
Patent
1993-04-05
1994-01-11
Schilling, Richard L.
Radiation imagery chemistry: process, composition, or product th
Diazo reproduction, process, composition, or product
Composition or product which contains radiation sensitive...
430191, 430192, 430193, 430272, 430275, 430277, 430278, 534557, G03F 7023, G03F 709
Patent
active
052780210
ABSTRACT:
A radiation sensitive mixture comprising an alkali-soluble binder resin and at least one photoactive compound comprising a compound of formula (I): ##STR1## wherein each R is individually selected from hydrogen and a lower alkyl group having 1 to 4 carbon atoms; n is either 0, 1, or 2; and D is selected from the group consisting of hydrogen or o-naphthoquinone diazide sulfonyl group; with the proviso that at least two D's are o-naphthoquinone diazide sulfonyl groups, and wherein the amount of said binder resin is about 70 to 95% by weight and the amount of photoactive compound being from about 5 to about 30% be weight, based on the total solids content of said content of said raditional-sensitive mixture.
REFERENCES:
patent: 5010163 (1991-04-01), Serini et al.
patent: 5112719 (1992-05-01), Yamada et al.
Jeffries, III Alfred T.
Toukhy Medhat A.
OCG Microelectronic Materials Inc.
Schilling Richard L.
Simons William A.
Young Christopher G.
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