Null test fourier domain alignment technique for phase-shifting

Details Null test fourier domain alignment technique for phase-shifting Null test fourier domain alignment technique for phase-shifting

1999-01-12

2000-08-29

Kim, Robert H.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356400, G01B 902

Patent

active

061116467

ABSTRACT:
Alignment technique for calibrating a phase-shifting point diffraction interferometer involves three independent steps where the first two steps independently align the image points and pinholes in rotation and separation to a fixed reference coordinate system, e.g, CCD. Once the two sub-elements have been properly aligned to the reference in two parameters (separation and orientation), the third step is to align the two sub-element coordinate systems to each other in the two remaining parameters (x,y) using standard methods of locating the pinholes relative to some easy to find reference point.

REFERENCES:
Naulleau, Patrick, et al. "Characterization of the accuracy of EUV phase-shifting point diffraction interferometry", SPIE, v. 3331 (1998) 114-123.
Anderson, Erik H., et al., "Electron beam lithography digital pattern generator and electronics for generalized curvilinear structures", J. Vac. Sci. Technol.B, vol. 13, No. 6, (1995) 2529-2534.
Brophy, Chris P., "Effect of intensity error correlation on the computed phase of phase-shifting interferometry", J. Opt. Soc. Am. A, vol. 7, No. 4 (1990) 537-541.
Medecki, H., et al., "Phase-shifting point diffraction interferometer" Optics Letters, vol. 21, No. 19 (1996) 1526-1528.

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