"Null" flow sensor

Details "Null" flow sensor "Null" flow sensor

1990-06-01

1993-03-02

Goldstein, Herbert

Measuring and testing

Volume or rate of flow

By measuring thrust or drag forces

G01F 128

Patent

active

051899183

ABSTRACT:
A flow sensing device includes a semiconductor substrate 31 and a pivoted beam 1. Below one half of the beam is a channel 7 running throughout the substrate 31, and below the other half of the beam is a cavity 8. During operation, a differential force exists across the beam, and the amount of force required to compensate for this differential force is indicative of the rate of fluid flow.

REFERENCES:
patent: 4483194 (1984-11-01), Rudolf
patent: 4550616 (1985-11-01), Mott
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4848157 (1989-07-01), Kobayashi
patent: 4890480 (1990-01-01), Young
patent: 4938053 (1990-07-01), Jepson et al.

Affiliated with

Also associated with

Rating

"Null" flow sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with "Null" flow sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and "Null" flow sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-120085