Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2008-03-10
2011-11-29
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000
Reexamination Certificate
active
08068209
ABSTRACT:
An immersion lithography tool with a diverter element, positioned between the immersion element and the substrate, for altering the “footprint” or shape of the meniscus of the body of immersion liquid between the last optical element and an immersion element on one side, and the substrate on the other side when the substrate is moved. The apparatus includes a substrate holder to hold the substrate having an imaging surface and a projection optical system having a last optical element. The projection optical system projects an image onto a target imaging area on the substrate through the immersion liquid filled in a gap between the imaging surface of the substrate and the last optical element. An immersion element maintains the immersion fluid in the gap. The diverter element is positioned between the immersion element and the substrate. The diverter element alters the footprint shape of the meniscus of the body of immersion liquid, thereby preventing or reducing the amount of leakage from a space between the substrate and the immersion element.
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Coon Derek
Keswani Guarav
Kho Leonard Wai Fung
Poon Alex Ka Tim
Nguyen Hung Henry
Nikon Corporation
Oliff & Berridg,e PLC
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