Nozzle for thinning of phosphine

Details Nozzle for thinning of phosphine Nozzle for thinning of phosphine

2007-01-16

2007-01-16

Jiang, Chen Wen (Department: 3744)

Fluid sprinkling, spraying, and diffusing

Combining of separately supplied fluids

Plural inlets to one stream from another

C239S432000, C239S422000, C239S009000

Reexamination Certificate

active

10118814

ABSTRACT:
The present invention relates to a nozzle for thinning of phosphine (chemical formula PH3), which is consisting in a tube-like air-inducing, a ring-like mounted split (ring split) and/or in at least one lateral mounted little tube as PH3-inducing (inducer), whereby the thickness of the split opening and/or of the opening of the little tube is maximum 1/25 of the diameter of the tube like air-inducing (inducer) and/or of the distance between the surface of an air guiding element and the inner side of the tube-like air-inducing (inducer) in the area of the PH3-entrance.

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