Nozzle for the continuous depositing of a layer of solid materia

Details Nozzle for the continuous depositing of a layer of solid materia Nozzle for the continuous depositing of a layer of solid materia

1980-11-07

1982-11-30

Kashnikow, Andres

Fluid sprinkling, spraying, and diffusing

Combining of separately supplied fluids

At or beyond outlet

118718, 118725, 239433, 239455, 427426, B05B 700, B05D 134, C03C 17245

Patent

active

043612849

ABSTRACT:
A nozzle for depositing a layer of solid material on a heated substrate, in particular by chemical vapor deposition, comprises three supply chambers for gas, which chambers communicate with three prismatic spaces which converge towards an outlet slot divided into three by two longitudinal strips which are tensioned at both ends and are applied against support surfaces which provide the strips with their respective inclinations centered on the truncated apex of a prismatic cavity which is divided by the strips to form the prismatic spaces. This arrangement enables a uniform spacing of the outlet slots of the spaces to be maintained whatever the length of the nozzle.

REFERENCES:
patent: 3511703 (1970-05-01), Peterson
patent: 3970037 (1976-07-01), Sopko
patent: 4270702 (1981-06-01), Nicholson

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