Coating apparatus – With cutting – punching or tearing of work – Web or sheet work
Patent
1977-01-06
1978-11-14
Reynolds, Wm. Carter
Coating apparatus
With cutting, punching or tearing of work
Web or sheet work
427118, C23C 1308
Patent
active
041250869
ABSTRACT:
A novel, high-flux source for use in the vapor deposition of electrode maials, such as gold, during the fabrication of precision quartz-crystal resonators, or the like. The design is based on the theory and technology of nozzle beams. The nozzle beam type source disclosed herein is conceived: (1) to permit large deposition rates with minimum wastage of electrode material; (2) to operate in high vacuum; (3) to emit vapor in a horizontal direction, thereby permitting the use of a pair of sources to plate both sides of a substrate simultaneously; and (4) to operate for extended periods of time without requiring frequent breaking of the vacuum in order to replenish the source. It is estimated that this design can operate at a deposition rate equal or above that of a conventional evaporation-type source with less than one percent of the wastage of electrode material experienced with a conventional source.
REFERENCES:
patent: 2363781 (1944-11-01), Ferguson
patent: 2734478 (1956-02-01), Reynolds et al.
patent: 3271561 (1966-09-01), Fielder et al.
patent: 3572672 (1971-03-01), Harel
patent: 3867183 (1975-02-01), Cole
patent: 3971334 (1976-07-01), Pundsack
patent: 3989862 (1976-11-01), Butler et al.
patent: 4050408 (1977-09-01), Beucherie
Andres Ronald P.
Hafner Erich
Vig John R.
Edelberg Nathan
Goldberg Edward
Kanars Sheldon
Reynolds Wm. Carter
The United States of America as represented by the Secretary of
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